Excimer

Highest efficiency for wafer cleaning, glass cleaning, surface activation and ozone production.
 
The revolutionary XERADEX xenon excimer lamp system from OSRAM opens up entirely new possibilities in process technology. Our patented pulsed mode of operation yields four times the radiation power of conventional excimer radiators: 40 percent of the input energy is converted into useable vacuum ultraviolet (VUV) radiation. Their high efficiency makes these systems ideal for very effective, flexible use in many demanding applications, such as surface treatment, ozone production, laquer frosting, water purification, and many more.
 
The unique operating principle leads to unbeatable efficiency - with no cooling required The XERADEX system has an outstanding 40 percent conversion efficiency (electrical to UV) compared to 10 percent in conventional sinusoidally driven systems. This tremendous advantage is due to our patented pulsed operation mode and to the innovative lamp design of XERADEX. When operated using the companion electronic control gear (ECG), the result is a compact system of remarkable performance. The quartz bulb functions as a dielectric barrier within a unique electrode system, which prevents the formation of an electric arc during the discharge phase. If xenon is the fill gas - as in the XERADEX lamps - and if a special pulsed voltage is applied across the electrodes, unstable xenon excimer molecules (Xe2*) are formed from the xenon atoms. These molecules dissociate by emitting VUV radiation at 172 nm. The XERADEX lamps emit incoherent VUV radiation.
 
The exceptional efficiency of these systems means no cooling of the lamp is required, as the temperature of the radiator never exceeds 80°C (175°F). This flexibility facilitates the integration of XERADEX systems into even the most sophisticated processes and advanced production equipment.

e40 xeradex

Fields of application

  • Surface activation and modification
  • Ozone production
  • Water cleaning and ultra-pure water preparation
  • Evaluation of fluorescent substances
  • Photochemical experiments

Surface activation and modification

  • Removal of polymers:
    • Removal of organic residue
    • Cleaning of photo masks
    • Improved coating properties of photosensitive resist
    • Improved yield of deposition
    • Resist removal
    • Etching (e.g., Teflon)
  • Surface treatment:
    • Activation of surface bonds
    • Adjustment of wetting angle
    • Higher coating yield
    • Better bonding performance
    • Faster and better vacuum in process chambers
  • No external ozonator required for the UV/ozone cleaning process
  • Photo induced metallization at room temperature on various surfaces, e.g., plastics
  • Photo induced CVD at lower process temperatures (high k-deposition, high growth rate, low temperature)
  • Laquer frosting: microfolding of radiation curable coatings to generate dull surfaces

Ozone production

  • Direct dissociation of oxygen by the high energetic XERADEX radiation and formation of ozone: no by-products, such as NOx are produced
  • Highly efficient ozone production with the XERADEX lamps. Ozone yield: 82 g/kWh
  • No cooling required
  • In-situ production of ozone

Water cleaning and ultra-pure water preparation

  • Efficient production of reactive -OH radicals
  • Complete mineralization of organic components
  • Preparation of ultra-pure water

Other fields of application

  • Evaluation of fluorescent substances
  • Photochemical experiments


The compact XERADEX systems offer a multitude of advantages to the user:

  • For the first time, a highly efficient VUV radiation source is available for different demanding industrial applications
  • Its 40 percent efficiency eliminates the need for cooling of the lamp - the temperature of the radiator never exceeds 80°C (176°F) "cold radiation"; low temperature processing is possible
  • The system of lamp and electronic control gear is compact and easy to handle
  • Convenient, compact irradiation systems are possible, minimizing space in costly cleanroom environments
  • Lamp starts instantly with no warm-up phase; the ignition is independent of the ambient temperature; no shutters are necessary
  • No limitations on switching cycles; capable of instant restrike with no detriment to lamp life
  • PLC control output
  • Operation of the lamp in different environments is possible, such as in gaseous media and under vacuum conditions
  • The lamp is environmentally friendly; it contains inert gases exclusively with no mercury used